The National Science Foundation has awarded Prof. John Goree in the University of Iowa Department of Physics and Astronomy a $405,000 grant to study how to mitigate dust contamination in semiconductor manufacturing.

“Collaborative Research: ECLIPSE-CHIPS: Avoiding contamination by controlling charging and transport of particles in plasmas under modulation and afterglow conditions” is a collaborative research project between the University of Iowa and Appalachian State University. Principal investigators (PIs) are Prof. Goree and Appalachian State Assistant Professor Anton Kananovich, a 2020 Ph.D. graduate from the UI Department of Physics and Astronomy.

The project aims to develop methods for mitigating particle contamination in semiconductor manufacturing by controlling the charging and transport of particles in plasma environments, particularly during plasma afterglow conditions and modulated-power operation. The research involves conducting experiments and simulations to expand the understanding of particle behavior and develop strategies to electrostatically lift and eliminate particles before they can contaminate silicon wafers.

The project also includes K-12 outreach, course development, and training of undergraduate and graduate students. This award is part of the Ecosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program.